[1]林晨、许永超.单晶蓝宝石衬底磨粒抛光技术研究现状[J].福建工程学院学报,2021,19(03):216-222.[doi:10.3969/j.issn.1672-4348.2021.03.003]
　LIN Chen,XU Yongchao.Research status of abrasive polishing technology for single crystal sapphire substrate[J].Journal of FuJian University of Technology,2021,19(03):216-222.[doi:10.3969/j.issn.1672-4348.2021.03.003]
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单晶蓝宝石衬底磨粒抛光技术研究现状()
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《福建工程学院学报》[ISSN:2097-3853/CN:35-1351/Z]

卷:
第19卷
期数:
2021年03期
页码:
216-222
栏目:
出版日期:
2021-06-25

文章信息/Info

Title:
Research status of abrasive polishing technology for single crystal sapphire substrate
作者:
林晨、许永超
福建工程学院材料科学与工程学院
Author(s):
LIN Chen;  XU Yongchao
School of Materials Science and Engineering, Fujian University of Technology
关键词:
蓝宝石; 磨粒加工; 游离磨料; 固结磨料; 半固结磨料
Keywords:
sapphire;  abrasive processing;  free abrasive polishing;  fixed abrasive polishing;  semi-fixed abrasive polishing
分类号:
TH113
DOI:
10.3969/j.issn.1672-4348.2021.03.003
文献标志码:
A
摘要:
结合单晶蓝宝石衬底磨粒抛光工艺的最新研究进展，从磨粒加工的去除过程出发，综述了应用于单晶蓝宝石衬底抛光的游离、固结、半固结磨料抛光工艺的材料去除模型、工艺特点及各因素影响规律，从材料去除率和表面质量的角度对不同的磨粒抛光工艺展开了分析。根据单晶蓝宝石衬底的应用需求和目前抛光方法存在的不足，指出了蓝宝石衬底超精密抛光技术的下一步研究方向。
Abstract:
Combined with the latest research progress of single crystal sapphire substrate abrasive polishing technology, starting from the process of abrasive removal, a review was conducted of the material removal model, process characteristics and the influence law of the various factors of free, fixed and semi-fixed abrasive polishing technology applied to single crystal sapphire substrate polishing. Different abrasive polishing processes were analyzed from the perspective of material removal rate and surface quality. According to the application requirements of single crystal sapphire substrate and the shortcomings of current polishing methods, the following research direction of ultra-precision polishing technology for sapphire substrate is pointed out.

相似文献/References:

[1]程蔚,方从富.基于单颗磨粒划擦蓝宝石的磨屑形态仿真[J].福建工程学院学报,2023,21(03):301.[doi:10.3969/j.issn.1672-4348.2023.03.016]
　CHENG Wei,FANG Congfu.Grinding chipmorphology simulation based on single abrasive scratching sapphire[J].Journal of FuJian University of Technology,2023,21(03):301.[doi:10.3969/j.issn.1672-4348.2023.03.016]

更新日期/Last Update: 2021-06-25