参考文献/References:
[1] RAYLEIGH L. On waves propagated along the plane surface of an elastic solid[J]. Proceedings of the London Mathematical Society, 1885, s1-17(1): 4-11. [2] 周剑. 柔性声表面波器件基础研究[D]. 杭州: 浙江大学, 2015. [3] MOHANAN A, PARTHIBAN R, RAMAKRISHNAN N. Shadow mask assisted direct growth of ZnO nanowires as a sensing medium for surface acoustic wave devices using a thermal evaporation method[J]. Journal of Micromechanics and Microengineering, 2016, 26(2): 025017. [4] HE X, ZHOU J, WANG W, et al. High performance dual-wave mode flexible surface acoustic wave resonators for UV light sensing[J]. Journal of Micromechanics and Microengineering, 2014, 24(5): 055014. [5] ZANG Y, ZHANG F, HUANG D, et al. Flexible suspended gate organic thin-film transistors for ultra-sensitive pressure detection[J]. Nature Communications, 2015, 6(1): 6269. [6] KOIKE J, SHIMOE K, IEKI H. 1.5 GHz low-loss surface acoustic wave filter using ZnO/sapphire substrate[J]. Japanese Journal of Applied Physics, 1993, 32(Part 1, No. 5B): 2337-2340. [7] ZHOU J, DONG S, JIN H, et al. Flexible surface acoustic wave device with AlN film on polymer substrate[J]. Journal of Control Science and Engineering, 2012, 2012: 1-5. [8] PARK S, VOSGUERICHIAN M, BAO Z. A review of fabrication and applications of carbon nanotube film-based flexible electronics[J]. Nanoscale, 2013, 5(5): 1727. [9] LUO J, HE X, ZHOU J, et al. Flexible and transparent surface acoustic wave microsensors and microfluidics[J]. Procedia Engineering, 2015, 120: 717-720. [10] JIN H, ZHOU J, HE X, et al. Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications[J]. Scientific Reports, 2013, 3(1): 2140. [11] XU H, DONG S, XUAN W, et al. Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film[J]. Applied Physics Letters, 2018, 112(9): 093502. [12] 何兴理. 新型声波谐振器及其传感应用研究[D]. 杭州: 浙江大学, 2015.